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Interconnecting Silicon Posts by Pyrolyzing Diffraction-Induced SU-8 Fibers

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Abstract:

Silicon postsare fabricated by inductively coupled plasmaetching (ICP). Then, a SU-8 layer is spin-coated. During the photolithography, the opening areas of mask are aligned to the top surface of the underlying silicon posts.SU-8 fibers that interconnect the underlying silicon postsare created due to the mask-induced diffraction effect. After pyrolysis, SU-8 photoresist is transformedinto carbon, and as the results, carbon fibers that interconnect the underlying silicon postsare created.

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Periodical:

Advanced Materials Research (Volume 773)

Pages:

617-621

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.773.617

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Cite this paper

Online since:

September 2013

Authors:

Hui Zheng, Yang Gao, Shu Lan Jiang, Zi Rong Tang, Tie Lin Shi, Qi Xia

Keywords:

Alignment, Carbon Nanofiber, Diffraction, Interconnect, Pyrolysis

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] Singh A, Jayaram J, Madou M: Journal of The Electrochemical SocietyVol. 149(2002), p. E78.

Google Scholar

[2] Park BY, Taherabadi L, Wang C, Zoval J: Journal of The Electrochemical Society Vol. 152(2005), p. J136.

Google Scholar

[3] Tang Z, Shi T, Gong J, Nie L, Liu S: Thin Solid Films Vol. 518(2010), p.2701.

Google Scholar

[4] Lee SW, Lee CH, Lee JA, Lee SS: Nanotechnology. 2013; 24(2).

Google Scholar

[5] Rouabah HA, Park BY, Zaouk RB, Morgan H, Madou MJ, Green NG: Journal ofMicromech- anicsand Microengineering Vol. 21(2011)035018.

Google Scholar

[6] Clark JE, Olesik SV: Journal of Chromatography A Vol. 1217(2010), p.4655.

Google Scholar

[7] Chunlei W, Guangyao J, Madou MJ: Microelectromechanical Systems Vol. 14(2005), p.348.

Google Scholar

[8] Campo Ad, Greiner C: Journal of Micromechanics and Microengineering Vol. 17(2007), p. R81.

Google Scholar

[9] Meliorisz Bl, Erdmann A: MEMS and MOEMS Vol. 6(2007), p.023006.

Google Scholar

[10] Long H, Xi S, Liu D, Shi TL, Xia Q, Liu SY: Optics Express Vol. 20(2012), p.17126.

Google Scholar

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