Lead-Free Oxide Thin Films for Gas Detection

Abstract:

In view to develop gas sensors, a first generation of lead-free thin films was deposited by different techniques on commercial Si and Al₂O₃ substrates. During our research project, the correlation between the micro structure of films, the structure of the embedded sensors and the applied temperature range, is being studied. In the first year, doped and undoped BaTiO₃, KNbO₃ and ZnO thin films have been deposited by sol-gel and PLD techniques. BT and BST films have shown a polycrystalline structure with very fine and regular grains, while disoriented grains with an average size ranging from 50 to 200 nm were observed on the KNbO₃ film surface, and ZnO films exhibited a columnar growth. All films were characterized and finally embedded to make semiconductor gas sensors which have been tested under different gases. In this first generation of sensors, ZnO sensors have shown encouraging preliminary results under CO and H₂S gases. Keywords : thin films, lead-free oxide, sensor, gas.

• Periodical: Advanced Materials Research (Volume 789)
• Pages: 105-111
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.789.105
• Online since: September 2013
• Authors: Didier Fasquelle, S. Députier, M. Mascot, N. Uschanoff, V. Bouquet, V. Demange, M. Guilloux-Viry, J.C. Carru
• Keywords: Gas, Lead-Free Oxide, Sensor, Thin Film

References

[1] D. Fasquelle, M. Mascot, J. -C. Carru, Electrical properties optimization of Ba0. 9Sr0. 1TiO3 thin films deposited by sol-gel, Advanced Materials Research Vol. 277 (2011) pp.1-10.

DOI: 10.4028/www.scientific.net/amr.277.1

[2] M. Mascot, D. Fasquelle, J. -C. Carru, Very high tunability of BaSnxTi1-xO3 ferroelectric thin films deposited by sol-gel, Functional Materials Letters, vol. 4, n° 1, pp.49-52 (2011).

DOI: 10.1142/s1793604711001646

[3] J. -C. Carru, M. Mascot, D. Fasquelle, Electrical characterizations of lead free Sr and Sn doped BaTiO3 ferroelectric films deposited by sol-gel", "Ferroelectrics, book, INTECH (Rijeka, Croatia), ch. 3, pp.49-72 (2011).

DOI: 10.5772/16485

[4] D. Fasquelle, M. Mascot, J. -C. Carru, On the research of lead-free material challengers for PZT replacement, Solid-State Electronics 75 (2012) 6–12.

DOI: 10.1016/j.sse.2012.04.031

[5] Thesis Manuel Mascot, University of Littoral Côte d'Opale, (2009).

[6] A. Rousseau, V. Laur, M. Guilloux-Viry, G. Tanné, F. Huret, S. Députier, A. Perrin, F. Lalu, P. Laurent, Pulsed laser deposited KNbO3 thin films for applications in high frequency range, Thin Solid Films 515 (2006) 2353.

DOI: 10.1016/j.tsf.2006.04.010

[7] A.M. Gas'kov and M.N. Rumyantseva, Materials for solid-State gas sensors, Inorganic Materials, Vol. 36, N°3, 2000, pp.293-301.

DOI: 10.1007/bf02757935

[8] Jin Huang and Qing Wan, Gas sensors based on semiconducting metal oxide one-dimensional nanostructures, Review, Sensors, 9, pp.9903-9924, (2009).

DOI: 10.3390/s91209903

[9] Kyoung Jin Choi and Ho Won Jang, One dimensional oxide nanostructures as gas-sensing materials : Review and Issues, Sensors, 10, pp.4083-4099, (2010).

DOI: 10.3390/s100404083