Synthesis of SnO2 Nanostructure Thin Film and its Prospective as Gas Sensors

Brian Yuliarto; Nugraha Nugraha; Bernardus Epindonta; Rifai Aditia; Muhammad Iqbal

doi:10.4028/www.scientific.net/AMR.789.189

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 789Synthesis of SnO2 Nanostructure Thin Film and its...

Synthesis of SnO₂ Nanostructure Thin Film and its Prospective as Gas Sensors

Abstract:

This report describes the preparation of gas sensors based on SnO₂ semiconductor nanostructure thin films synthesized using chemical bath deposition (CBD) technique. As the rapid demand of the gas sensors based on the semiconductor materials, there have been significant efforts to improve the performance of the semiconductors sensors. SnO₂, which has good electrical and mechanical properties, is one of the potential materials to be developed. In the present study, the SnO₂, prepared using CBD technique with stannous cloride as precursors, has nanopattern that give much SO₂ particles to access into the semiconductor surface. The resulting nanostructure SnO₂thin films have been confirmed by X Ray Diffractions (XRD), Energy Dispersive Spectroscopy (EDS) and Scanning Electronic Micrsocopy (SEM). The as fabricated SnO₂ thin films sensors were then characterized as SO₂ gas sensors in various concentrations for several different operating temperatures. The sensors have good sensitivity as low as 30 ppm of SO₂ gas at the optimum temperature of 200⁰ C.

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Periodical:

Advanced Materials Research (Volume 789)

Pages:

189-192

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.789.189

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Online since:

September 2013

Authors:

Brian Yuliarto, Nugraha Nugraha, Bernardus Epindonta, Rifai Aditia, Muhammad Iqbal

Keywords:

Chemical Bath Deposition (CBD), Nanostructure, Sensor, SnO₂, SO₂ Gas, Thin Film

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