The Effect of Annealing Atmosphere on Electrical Properties of BST Thin Films Prepared on Copper Foils

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Abstract:

Ba0.7Sr0.3TiO3 (BST) thin films have been prepared on copper foils via sol-gel method in almost inert atmosphere containing different level of oxygen which was achieved by flowing high purified argon with the varied rate from 0.3 L/min to 2.0 L/min. X-ray diffraction pattern of the BST thin film exhibits dominant perovskite phase. SEM images reveal good crystallization and much dense structure of the thin film. The BST thin film annealed at almost inert atmosphere by flowing the high purified argon at the rate of 0.5 L/min, exhibits highest dielectric constants which are 1549.65 and 1350.86 at the frequency of 10 kHz and 1 MHz, respectively. Additionally, the film also shows optimized ferroelectric behavior and low leakage current density. The mechanism of the annealing atmosphere on properties of BST thin films was investigated.

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Advanced Materials Research (Volumes 79-82)

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831-834

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August 2009

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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[1] 0 Dielectric loss tanδ Electric Field (kV/cm) Dielectric constant εr.

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3L/min.

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5L/min.

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[1] 0L/min.

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[2] 0L/min 10 kHz -300 -200 -100 0 100 200 300 -400 -200 0 200 400 600 800 1000 1200 1400.

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[2] 0 Dielectric loss tanδ.

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3L/min.

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5L/min.

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[1] 0L/min.

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[2] 0L/min Electric Field (kV/cm) Dielectric constant εr 1 MHz (a) (b) Fig. 3 Frequency dependence of dielectric behavior of BST thin films with 600nm thickness (a): 10 kHz; (b): 1 MHz -400 -300 -200 -100 0 100 200 300 400 -15 -10 -5 0 5 10 15.

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3L/min.

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5L/min.

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[1] 0L/min.

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[2] 0L/min Electric field/ kV/cm Polarization/ uC/cm2 0 1 2 3 4 5 6 7 0 500 1000 1500 2000 2500 3000 Leakage current/ uA/cm2.

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3L/min.

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5L/min.

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[1] 0L/min.

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[2] 0L/min Voltage/ V Fig. 4 P-E curve of BST thin films with 600nm thickness Fig. 5 Leakage current density as a function of voltage for BST thin films with 600nm thickness.

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