Effect of Operated Pressure on Anticorrosive Behavior of Ta2O5 Thin Film Grown by D.C. Reactive Magnetron Sputtering System

Narathon Khemasiri; Chanunthorn Chananonnawathorn; Mati Horprathum; Yossawat Rayanasukha; Darinee Phromyothin; Win  Bunjongpru; Supanit Porntheeraphat; Jiti Nukeaw

doi:10.4028/www.scientific.net/AMR.802.242

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 802Effect of Operated Pressure on Anticorrosive...

Effect of Operated Pressure on Anticorrosive Behavior of Ta₂O₅ Thin Film Grown by D.C. Reactive Magnetron Sputtering System

Abstract:

Tantalum oxide (Ta₂O₅) thin films, 100 nm thick were deposited by D.C. reactive magnetron sputtering system at different operated pressure on unheated p-type silicon (100) wafer and 304 stainless substrates. Their crystalline structure, film surface morphology and optical properties, as well as anticorrosive behavior, were investigated. The structure and morphology of films were characterized by grazing-incidence X-ray diffraction (GIXRD) and atomic force microscopy (AFM). The optical properties were determined by spectroscopic ellipsometry (SE). The corrosion performances of the films were investigated through potentiostat and immersion tests in 1 M NaCl solutions. The results showed that as-deposited Ta₂O₅ thin films were amorphous. The refractive index varied from 2.06 to 2.17 (at 550 nm) with increasing operated pressure. The corrosion rate of Ta₂O₅ thin film improves as the operated pressure decreases. The Ta₂O₅ thin films deposited at 3 mTorr operated pressure could be exhibited high performance anticorrosive behavior.

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Periodical:

Advanced Materials Research (Volume 802)

Pages:

242-246

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.802.242

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Online since:

September 2013

Authors:

Narathon Khemasiri, Chanunthorn Chananonnawathorn, Mati Horprathum, Yossawat Rayanasukha, Darinee Phromyothin, Win Bunjongpru, Supanit Porntheeraphat, Jiti Nukeaw

Keywords:

DC Magnetron Sputtering, Spectroscopic Ellipsometry, Tantalum Oxide

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References

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