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Influence of Deposition Time on Amorphous Carbon Thin Films Performance with Aerosol-Assisted Chemical Vapor Deposition

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Abstract:

Pure amorphous Carbon (a-C) thin films had been deposited by Aerosol-Assisted CVD (AACVD) onto glass substrate in Argon atmosphere. The camphor oil was chosen as the carbon precursor to prepare the a-C thin films with the deposition time of 15 minutes, 30 minutes, 45 minutes, 60 minutes and 75 minutes. The electrical, optical and structural properties of the deposited a-C were discussed by using the current-voltage solar simulator system, UV-Vis-Nir spectrophotometer and Raman spectroscope respectively. For the electrical characterization, the samples showed the photoresponse performance when being illuminated under AM 1.5 illuminations: 100 mW/cm2, 25°C. Transmittance value for the a-C thin films was also considered high ~80% and the structural analysis by using Raman spectroscope exhibit two main peaks known as the D-peak and G-peak which is typical for the a-C.

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Periodical:

Advanced Materials Research (Volume 832)

Pages:

712-717

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.832.712

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Online since:

November 2013

Authors:

A.N. Fadzilah, Dayana Kamaruzaman, Yosri M. Siran, M. Rejab Syahril Anuar, Ahmad Jaril Asis, Tahirruddin Syawaluddin, Mohamad Rusop Mahmood

Keywords:

Aerosol-Assisted CVD, Amorphous Carbon, Electrical Properties, Optical Property, Structural Property

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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