Wettability Study Using O₂ and Ar RIE Gas Treatment on Aluminium Surface

Abstract:

Wettability is one of the most important aspects in microfluid technology. The effect of surface roughness on the wettability by a liquid has been studied experimentally using Design of Experiment(DOE). Sixteen samples were etched using Reactive Ion Etching (RIE) technique with different combination of parameters. RIE parameters concerned in this experiment are ratio of Oxygen, Argon, ICP power and BIAS power. Reactive Ion Etching influences surface morphology which is correlated with the contact angle produced. This preliminary study is to gain information on the how does RIE affects the aluminum bondpad in terms of surface roughness and contact angle.

• Periodical: Advanced Materials Research (Volume 896)
• Pages: 233-236
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.896.233
• Online since: February 2014
• Authors: Vithyacharan Retnasamy*, Zaliman Sauli, Moganraj Palianysamy, Steven Taniselass, Phaklen Ehkan, Fairul Afzal Ahmad Fuad
• Keywords: Design of Experiment (DOE), RIE, Wettability

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