Effects of Sputtering Coating Factors on Elastic Modulus of MoN Coatings

Parinya Srisattayakul; Charnnarong Saikaew; Anurat Wisitsoraat; Naphatara Intanon

doi:10.4028/www.scientific.net/AMR.896.249

Paper Titles

Wettability Study Using O₂and Ar RIE Gas Treatment on Aluminium Surface
p.233

Room-Temperature Deposition of ZnO Thin Films by Using DC Magnetron Sputtering
p.237

Defects Induced by Reactive Ion Etching in Ge Substrate
p.241

Effect of Electrolyte Composition on Corrosion Resistance in Nickel Plating Process for Coating Bonded Magnet PrFeB
p.245

Effects of Sputtering Coating Factors on Elastic Modulus of MoN Coatings
p.249

Effect of Anodizing in Surface Finishing on Speed Boat Impeller Made of Aluminum
p.253

Biomimetic Creation of Surfaces on Porous Titanium for Biomedical Applications
p.259

Production and Characterization of Biodegradable Plastics Based on Starch of Artocarpus heterophyllus Lam Seeds
p.263

Characteristics of Mg-Ca-Zn Alloy Metallic Foam Based on Mg-Zn-CaH₂ System
p.267

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 896Effects of Sputtering Coating Factors on Elastic...

Effects of Sputtering Coating Factors on Elastic Modulus of MoN Coatings

Abstract:

Surface quality of an upper hook, an important fishing net-weaving machine component manufactured from stainless steel, was improved by systematically investigating the effects of sputtering coating factors using experimental design. Three factors of MoN coating on upper hooks including DC current, operating pressure, and Ar/N₂ ratio were studied and optimized for maximum elastic modulus. It was found that the three coating factors affected the elastic modulus of the MoN coating on upper hooks. In addition, the optimal operating condition for MoN coating that produced a maximum elastic modulus was obtained at DC current of 0.35 A, operating pressure of 0.01 mbar, and Ar/N₂ ratio of 1.5.

You might also be interested in these eBooks

Advanced Materials Science and Technology

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 896)

Pages:

249-252

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.896.249

Citation:

Cite this paper

Online since:

February 2014

Authors:

Parinya Srisattayakul, Charnnarong Saikaew*, Anurat Wisitsoraat, Naphatara Intanon

Keywords:

2^k Factorial Design, Elastic Modulus, Fishing Net-Weaving Machine, MoN, Sputtering

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

* - Corresponding Author

References

[1] Information on http: /www. fisheries. go. th.

Google Scholar

[2] V.P. Anitha, A. Bhattacharya, N.G. Patil, S. Major, Study of sputtered molybdenum nitride as a diffusion barrier, Int. J. Thin Solid Films. 236 (1993) 306-310.

DOI: 10.1016/0040-6090(93)90687-k

Google Scholar

[3] Y.G. Shen, Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films, Int. J. Mater. Sci. & Engineer. A. 359 (2003) 158-167.

DOI: 10.1016/s0921-5093(03)00336-8

Google Scholar

[4] T. Suszko, W. Gulbinski, J. Jagielski, The role of surface oxidation in friction processes on molybdenum nitride thin films, Surf. & Coat. Technol. 194 (2005) 319-324.

DOI: 10.1016/j.surfcoat.2004.07.119

Google Scholar

[5] M.K. Kazmanli, M. Urgen, A.F. Cakir, Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD, Surf. & Coat. Technol. 167 (2003) 77-82.

DOI: 10.1016/s0257-8972(02)00866-6

Google Scholar

[6] C. Anthony, The IBIS Handbook of Nanoindentation, Fisher-Cripps Laboratories Pty Ltd., Australia, (2005).

Google Scholar

[7] Information on www. ibisonline. com. au.

Google Scholar

[8] D.C. Montgomery, Design and Analysis of Experiments, fifth ed., John Wiley & Sons, New York, U.S.A., (2004).

Google Scholar

[9] C. Sarioglua, U. Demirlerb, M.K. Kazmanlib, M. Urgen, Measurement of residual stresses by X-ray diffraction techniques in MoN and Mo2N coatings deposited by arc PVD on high-speed steel substrate, Surf. & Coat. Technol. 190 (2005) 238-243.

DOI: 10.1016/j.surfcoat.2004.08.184

Google Scholar

[10] H. Hazar, Characterization of MoN coatings for pistons in a diesel engine, Mater. Des. 31 (2010) 624-627.

DOI: 10.1016/j.matdes.2009.06.006

Google Scholar