Cu/Cu Direct Bonding by Metal Salt Generation Bonding Technique with Formic Acid and Citric Acid

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Abstract:

The effect of formic acid and citric acid surface modification on the bonded strength of the solid-state direct bonded interface of copper was investigated by SEM observations of interfacial microstructures and fractured surfaces. Copper surfaces were modified by boiling in 98% formic acid for 0.6 ks and 17% aqueous solution of citric acid for 0.96 s. Solid-state bonding was performed in a vacuum chamber at bonding temperature of 423 ~ 673 K under a pressure of 588 N (bonding time of 0.9 ks). As a result of surface modification by formic acid and citric acid, bonded joints were obtained at a bonding temperature 150 K (formic acid) and 100 K (citric acid) lower than that required for non-modified surfaces, and the bond strength was comparable to that of the maximum load.

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219-223

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May 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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