Experimental Research on Affect of Water Jet to Laser Compound Processing of Crystalline Silicon

Abstract:

A wavelength of 1064nm Nd: YAG laser was used to groove on silicon, then studying the affect of quality and processing efficiency by incoming jet in laser etching course of silicon: Water jet reduced doss, cracks and other defects which might be produced on the surface of groove. Software of matlab was used to restore the topography of tank’s bottom; analysis shown that the water jet had a scouring effect influence on tank’s bottom. Introduction of the water jet caused the loss of the laser energy, but it could improve processing efficiency indirectly by blowing away the slag.

• Periodical: Advanced Materials Research (Volumes 941-944)
• Pages: 2169-2172
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.941-944.2169
• Online since: June 2014
• Authors: Gen Fu Yuan, Chong Tian Zhang, Xue Hui Chen, Cheng Zhang, Yan Sheng Yao
• Keywords: Crystalline Silicon, Laser Etching, MATLAB, Water Jet

References

[1] Zoppel S, Farsari M and Merz R, et al: Laser Micro-machining of 3C–SiC Single Crystals[J]. Microelectronic Engineering, 2006, 83(4): 1400-1402.

DOI: 10.1016/j.mee.2006.01.064

[2] Binghui Li: Basic Research on Hybrid Processing of Electrochemical Jet Machining and Laser Beam Machining[D]. Nanjing University of Aeronautics and Astronautics, China 2010; 64-67(In Chinese).

[3] Iwatani N, Doan H D and Fushinobu K: Optimization of Near-infrared Laser Drilling of Silicon Carbide Under Water[J]. International Journal of Heat and Mass Transfer, 2014, 71: 515-520.

DOI: 10.1016/j.ijheatmasstransfer.2013.12.046

[4] Zhenqiang Xi, Deren Yang and Jun Chen: Research Progress of Cast Multicrystalline Silicon[J]. Journal of Materials, 2001, 15(2): 67-69. (In Chinese).

[5] Jinan Zhong: Surface 3D Micro-topography Analysis Using Image Processing Technology Based on Matlab[J]. Optical Technique, 2007, 1. (In Chinese).

[6] Changjie Feng, Xiaojue Liu and Wei Wang, et al: Characterization of Surface Topography of Interacting Surface[J]. Lubrication Engineering, 2008, 33(6): 42-45. (In Chinese).

[7] Yi Fang, Chongxun zheng and Xiangguo Yan: Research on an Auto-focusing Algorithm for Microscope[J] . Chinese Journal of Scientific Instrument, 2006, 26(12): 1275-1277. (In Chinese).

[8] Herrmann R F W, Gerlach J and Campbell E E B: Molecular Dynamics Simulation of Laser Ablation of Silicon[J]. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997, 122(3): 401-404.

DOI: 10.1016/s0168-583x(96)00565-4