The Nonlinear Analysis of Readout Circuit for Microgyroscope

Abstract:

In a vibratory microgyroscope, the nonlinear of the readout circuit is a critical part of the signal processing. This is because nonlinear can corrupt the resulting signals, including the angular velocity information. In this paper, issues related to nonliear are discussed. A detailed analysis of the effects caused by various nonidealities is provided. The nonlinear considered are as follows: the distance between the active comb and the fixed comb at the static modal and the equivalent capacitance at sensitive modal. In addition to the analysis of the nonlinear, which is necessary for a successful system-level design is provided.

• Periodical: Advanced Materials Research (Volume 981)
• Pages: 125-128
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.981.125
• Online since: July 2014
• Authors: Guan Shi Wang*, Xiao Wei Liu
• Keywords: Micromechanical Gyroscope, Nonlinear, Readout Circuit

References

[1] Mrigank Sharma, Elie H Sarraf, Edmond Cretu. Parametric Amplification/Damping in Mems Gyroscopes[C]. MEMS 2011, Cancun, Mexico, 2011: 617-620.

DOI: 10.1109/memsys.2011.5734500

[2] Hongzhi Sun, Kemiao Jia, Xuesong Liu, Guizhen Yan, Yu-Wen Hsu, Robert M. Fox, Huikai Xie. A CMOS-MEMS Gyroscope Interface Circuit Design With High Gain and Low Temperature Dependence[J], IEEE Sensors Journal, 2011, 11(11): 2740-2747.

DOI: 10.1109/icsens.2010.5690797

[3] S. Sonmezoglu, S.E. Alper, and T. Akin, An Automatically Mode-Matched Mems Gyroscope With 50 Hz Bandwidth[C], MEMS 2012, Paris, France, 2012: 523-526.

DOI: 10.1109/memsys.2012.6170231

[4] Chunhua He, Qiancheng Zhao, Jian Cui, Zhenchuan Yang, Guizhen Yan, A Research of the Bandwidth of a Mode-Matching MEMS Vibratory Gyroscope[C], NEMS 2012, Kyoto, Japan, 2012: 738-741.

DOI: 10.1109/nems.2012.6196880

[5] J. Seok, H. F. Tiersten, H. A. Scarton. An Analysis of a Vibratory Angular-rate Gyroscope Using Polarized Piezoceramic Bimorph Plates[J]. Part 2: Solution Procedure for the Gyroscope with Superposed Angular Velocity. IEEE Sound and Vibration. 2005, 280(1-2): 289-310.

DOI: 10.1016/j.jsv.2003.12.031

[6] T. Rogers, N. Aitken, K. Stribley, J. Boyd. Improvements in MEMS Gyroscope Production as a Result of Using in Situ, Aligned, Current-limited Anodic Bonding[J]. IEEE Sensors and Actuators. 2005, 123-124: 106-11.

DOI: 10.1016/j.sna.2005.03.009

[7] W. A. Clark, R. T. Howe, R. Horowitz. Surface Micromachined Z-axis Vibratory Rate Gyroscope[C]. Tech. Dig. Solid-state Sensors and Actuators Workshop. Los Angeles, United States, 1996: 283-287.

DOI: 10.31438/trf.hh1996.64

[8] X. Xiong, D. Lu, W. Wang. A Bulk-micromachined Comb Vibratory Microgyroscope Design[J]. Circuits and Systems. 2005, 1(7) 7: 151-154.

DOI: 10.1109/mwscas.2005.1594061

[9] McCluskey, P., Lemus, D. Performance and reliability of mems gyroscopes at high temperatures[C]. Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm). 2010: 1-5.

DOI: 10.1109/itherm.2010.5501319