The Influence of PZT Film Thickness on Microstructure in CSD Processing
The R&D of state of the art PZT (PbZrxTi1-xO3) films is important due to their piezoelectric, pyroelectric and ferroelectric properties. Currently, Chemical Solution Deposition (CSD) methods (e.g. spin coating of a sol-gel precursor solution) are successfully used in our lab to deposit PZT films with intermediate thickness. This method employs multiple coating procedures and different microstructure is observed after each coating. We report on the film microstructure evolution studied by quantitative analysis of HRSEM images as a function of thickness.
A. Etin et al., "The Influence of PZT Film Thickness on Microstructure in CSD Processing ", Advances in Science and Technology, Vol. 45, pp. 1268-1274, 2006