Surface Micromachining of Polyureasilazane Based Ceramic-MEMS Using SU-8 Micromolds
We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-1000μm-wide molds were used to confine a liquid precursor of SiC/Si3N4 based ceramics on the sacrificial layer that enables the detachment of the green body before the pyrolysis step at 1000°C. The final ceramic cantilever has dimensions ranging from 100-500μm x 1-2mm x 50μm and a smooth surface. Details of the processing, structural and material characterization such as Dynamic Rheological and Thermogravimetric Analysis under UV will be presented and compared to those found in the literature.
V. Fakhfouri et al., "Surface Micromachining of Polyureasilazane Based Ceramic-MEMS Using SU-8 Micromolds ", Advances in Science and Technology, Vol. 45, pp. 1293-1298, 2006