Surface Micromachining of Polyureasilazane Based Ceramic-MEMS Using SU-8 Micromolds

Vahid Fakhfouri; Sébastien Jiguet; Juergen Brugger

doi:10.4028/www.scientific.net/AST.45.1293

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Surface Micromachining of Polyureasilazane Based Ceramic-MEMS Using SU-8 Micromolds
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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 45Surface Micromachining of Polyureasilazane Based...

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS Using SU-8 Micromolds

Abstract:

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-1000μm-wide molds were used to confine a liquid precursor of SiC/Si3N4 based ceramics on the sacrificial layer that enables the detachment of the green body before the pyrolysis step at 1000°C. The final ceramic cantilever has dimensions ranging from 100-500μm x 1-2mm x 50μm and a smooth surface. Details of the processing, structural and material characterization such as Dynamic Rheological and Thermogravimetric Analysis under UV will be presented and compared to those found in the literature.

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Periodical:

Advances in Science and Technology (Volume 45)

Pages:

1293-1298

DOI:

https://doi.org/10.4028/www.scientific.net/AST.45.1293

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Online since:

October 2006

Authors:

Vahid Fakhfouri, Sébastien Jiguet, Juergen Brugger

Keywords:

Cantilever, Ceramics MEMS, Micromolding, Polyureasilazane, SU-8

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