Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients

Abstract:

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Possibilities of ZnO based thin films for applications as resistance materials with small temperature coefficients are investigated. The ZnO based thin films containing Cu, Mg, Al and In are deposited on sapphire c-face single crystal substrates or quartz glass substrates. Resistivities at room temperature and their temperature dependences of the obtained thin films are measured and discussed.

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Periodical:

Edited by:

P. VINCENZINI

Pages:

2376-2381

DOI:

10.4028/www.scientific.net/AST.45.2376

Citation:

Y. Sato et al., "Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients", Advances in Science and Technology, Vol. 45, pp. 2376-2381, 2006

Online since:

October 2006

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$35.00

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