Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients
Possibilities of ZnO based thin films for applications as resistance materials with small temperature coefficients are investigated. The ZnO based thin films containing Cu, Mg, Al and In are deposited on sapphire c-face single crystal substrates or quartz glass substrates. Resistivities at room temperature and their temperature dependences of the obtained thin films are measured and discussed.
Y. Sato et al., "Investigation of ZnO Based Thin Films as Resistance Materials with Small Temperature Coefficients", Advances in Science and Technology, Vol. 45, pp. 2376-2381, 2006