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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 45Fabrication and Morphological Stability of...

Fabrication and Morphological Stability of Aluminium Nanostructures En Route to Nanopatterned Sapphire

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Abstract:

It has recently been demonstrated that it is possible to produce a pristine surface layer on a lapped sapphire substrate by depositing a thin film of aluminum and subjecting it to an appropriate thermal treatment. This process also shows promise for the fabrication of nanopatterned sapphire by pre-patterning the aluminum metal prior to thermal conversion to sapphire. We have explored two distinct patterning processes: a dual layer photoresist e-beam lithography technique for fabricating arbitrarily shaped aluminum structures, and a novel, non-conventional mask-liftoff method involving nanoporous anodized aluminum oxide, useful for patterning very large scale arrays of sub-micron aluminum dots or posts. Our work is focused on refining the fabrication process and investigating the morphological stability of such metal nanostructures during conversion to sapphire.

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Periodical:

Advances in Science and Technology (Volume 45)

Pages:

945-950

DOI:

https://doi.org/10.4028/www.scientific.net/AST.45.945

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Online since:

October 2006

Authors:

Jeffrey M. Biser, Jason T. Perkins, Hong Wei Li, Helen M. Chan, Richard P. Vinci

Keywords:

Anodization, e-Beam Lithography, Nanopatterned Aluminium, Sapphire

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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