Fabrication and Morphological Stability of Aluminium Nanostructures En Route to Nanopatterned Sapphire

Abstract:

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It has recently been demonstrated that it is possible to produce a pristine surface layer on a lapped sapphire substrate by depositing a thin film of aluminum and subjecting it to an appropriate thermal treatment. This process also shows promise for the fabrication of nanopatterned sapphire by pre-patterning the aluminum metal prior to thermal conversion to sapphire. We have explored two distinct patterning processes: a dual layer photoresist e-beam lithography technique for fabricating arbitrarily shaped aluminum structures, and a novel, non-conventional mask-liftoff method involving nanoporous anodized aluminum oxide, useful for patterning very large scale arrays of sub-micron aluminum dots or posts. Our work is focused on refining the fabrication process and investigating the morphological stability of such metal nanostructures during conversion to sapphire.

Info:

Periodical:

Edited by:

P. VINCENZINI

Pages:

945-950

DOI:

10.4028/www.scientific.net/AST.45.945

Citation:

J. M. Biser et al., "Fabrication and Morphological Stability of Aluminium Nanostructures En Route to Nanopatterned Sapphire ", Advances in Science and Technology, Vol. 45, pp. 945-950, 2006

Online since:

October 2006

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$35.00

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