GaAs Non Resonant Micro-Sensors: Design and Simulations

C.R. Tellier; Stephane Durand

doi:10.4028/www.scientific.net/AST.54.428

Paper Titles

Strain Enhancement within Cantilevered, Piezoelectric MEMS Energy Scavenging Devices
p.405

3C-SiC Hetero-Epitaxial Films for Sensors Fabrication
p.411

Porous Metal Frameworks on Silicon Substrates
p.416

The Mechanical Behaviour of Silicon Diaphragms for Micromachined Capacitive Pressure Sensor
p.422

GaAs Non Resonant Micro-Sensors: Design and Simulations
p.428

Thin Film YBCO Pixels for MMW Detector
p.434

Micromask Generation for Polymer Morphology Control: Nanohair Fabrication for Synthetic Dry Adhesives
p.439

Wet Etching of Si Micro-Arrays: Experimental and Theoretical Shapes
p.445

Nanoparticles for Charge Storage Using Hybrid Organic Inorganic Devices
p.451

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 54GaAs Non Resonant Micro-Sensors: Design and...

GaAs Non Resonant Micro-Sensors: Design and Simulations

Abstract:

This paper reports on the design of piezoresistive GaAs sensors and focuses on non conventional orientations. The piezoresistive detection of in-plane longitudinal and shear stresses is studied to determine the best orientations for pressure and force sensors. Simulation of shapes for micromachined membranes and cantilevers allows us to select some (hk0) orientations for which the sensitivity is evaluated.