GaAs Non Resonant Micro-Sensors: Design and Simulations
This paper reports on the design of piezoresistive GaAs sensors and focuses on non conventional orientations. The piezoresistive detection of in-plane longitudinal and shear stresses is studied to determine the best orientations for pressure and force sensors. Simulation of shapes for micromachined membranes and cantilevers allows us to select some (hk0) orientations for which the sensitivity is evaluated.
Pietro VINCENZINI and Giuseppe D'ARRIGO
C.R. Tellier and S. Durand, "GaAs Non Resonant Micro-Sensors: Design and Simulations", Advances in Science and Technology, Vol. 54, pp. 428-433, 2008