Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses

Yoshifumi Aoi; Satoru Furuhata; Hiromi Nakano

doi:10.4028/www.scientific.net/AST.63.392

Paper Titles

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Development of Functionally Graded Coating Based Plasma Facing Materials for Fusion Reactor
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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 63Relationship Between Microstructure and Hardness...

Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses

Abstract:

ZrN/TiN multi-layers were synthesized by ion beam sputtering technique. Microstructure and mechanical property of the ZrN/TiN multi-layers were characterized and the relationships between microstructure and hardness of the ZrN/TiN multi-layers with various bilayer thicknesses and thickness ratios were investigated. The microstructure of multi-layers have been investigated using transmission electron microscope (TEM) and X-ray diffraction (XRD).

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Periodical:

Advances in Science and Technology (Volume 63)

Pages:

392-395

DOI:

https://doi.org/10.4028/www.scientific.net/AST.63.392

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Online since:

October 2010

Authors:

Yoshifumi Aoi, Satoru Furuhata, Hiromi Nakano

Keywords:

Hardness, Ion Beam Sputtering, Microstructure, Multilayer, ZrN/TiN

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