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Paper Titles
Preface and Committees
History and Recent Progress of MEMS Physical Sensors
p.1
Continuous Process for Large-Area Flexible MEMS
p.9
Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes
p.15
Micromachined Devices for Use in Terahertz Applications
p.20
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
p.28
Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method
p.34
Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview
p.39
Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems
p.49

Preface and Committees

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Periodical:

Advances in Science and Technology (Volume 81)

Online since:

September 2012

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