Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon

Borriboon Thubthimthong; Gih Keong Lau; Murukeshan Vadakke Matham

doi:10.4028/www.scientific.net/AST.81.28

Paper Titles

History and Recent Progress of MEMS Physical Sensors
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Continuous Process for Large-Area Flexible MEMS
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Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes
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Micromachined Devices for Use in Terahertz Applications
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Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
p.28

Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method
p.34

Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview
p.39

Foreign Bodies – The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems
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Integrated Microsystems
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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 81Rectilinear Electrothermal Actuator Using...

Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon

Abstract:

A precisely rectilinear electrothermal actuator integrated with highly thermally expandable micromachined composites of SU-8 and silicon is presented. The actuator is capable of producing a maximum output rectilinear displacement of 42 μm with an estimated blocked force of up to 61 mN. The actuator operates at a low temperature rise of less than 266 °C and at input voltage of less than 15 V. Thermal time constant of the actuator is measured to be less than 3 ms. Such a powerful and power-efficient actuator could benefits future devices in optical MEMS.

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Periodical:

Advances in Science and Technology (Volume 81)

Pages:

28-33

DOI:

https://doi.org/10.4028/www.scientific.net/AST.81.28

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Online since:

September 2012

Authors:

Borriboon Thubthimthong, Gih Keong Lau, Murukeshan Vadakke Matham

Keywords:

MEMS, Micro Machining, Micromachined Composite, SU-8, Thermal Actuator

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