History and Recent Progress of MEMS Physical Sensors

Abstract:

Recently various electronic control systems for automotive, industrial and consumer-electronic applications have been developed using advanced semiconductor technologies including MEMS sensors. This paper reviews the history of the development of the MEMS physical sensors and highlights their recent progress where their research trends are categorized into the following 4 items:ⅰ) Incorporation of heterogeneous sensors,ⅱ) Integration with advanced CMOS circuitry,ⅲ) Improvement on wafer-level packaging technology, ⅳ) Adoption of new materials. Several examples of each item are introduced in this paper.

• Periodical: Advances in Science and Technology (Volume 81)
• Pages: 1-8
• DOI: https://doi.org/10.4028/www.scientific.net/AST.81.1
• Online since: September 2012
• Authors: Hideo Muro
• Keywords: Accelerometer, MEMS, Micro Machining, Physical Sensor

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