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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 143-147Diffusion of Silicon and Phosphorus into Germanium...

Diffusion of Silicon and Phosphorus into Germanium as Studied by Secondary Ion Mass Spectrometry

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Diffusion in Materials DIMAT 1996

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Periodical:

Defect and Diffusion Forum (Volumes 143-147)

Pages:

1053-1058

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.143-147.1053

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Online since:

January 1997

Authors:

Ulf Södervall, M. Friesel

Keywords:

Diffusion, Germanium, Phosphorus, Silicon, SIMS

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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