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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 143-147Low Temperature Impurity Diffusion in 6H-SiC

Low Temperature Impurity Diffusion in 6H-SiC

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Diffusion in Materials DIMAT 1996

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Periodical:

Defect and Diffusion Forum (Volumes 143-147)

Pages:

1147-1152

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.143-147.1147

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Online since:

January 1997

Authors:

Nikolai T. Bagraev, L.E. Klyachkin, A.M. Malyarenko, V.L. Sukhanov, N.V. Zabrodskaya

Keywords:

6H-SiC, Low Temperature Boron and Phosphorus Diffusion

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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