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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 143-147Diffusion of Sb in Si1-xGex-Alloy Layers

Diffusion of Sb in Si_1-xGe_x-Alloy Layers

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Diffusion in Materials DIMAT 1996

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Periodical:

Defect and Diffusion Forum (Volumes 143-147)

Pages:

1125-1130

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.143-147.1125

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Online since:

January 1997

Authors:

P. Kringhøj, Arne Nylandsted-Larsen

Keywords:

Compressive Strain, Molecular Beam Epitaxy (MBE), Sb Diffusion, SiGe Layers, Tensile Strain

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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