Diffusion of Sb in Si1-xGex-Alloy Layers

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Periodical:

Defect and Diffusion Forum (Volumes 143-147)

Edited by:

H. Mehrer, Chr. Herzig, N.A. Stolwijk, H. Bracht

Pages:

1125-1130

DOI:

10.4028/www.scientific.net/DDF.143-147.1125

Citation:

P. Kringhøj and A. Nylandsted-Larsen, "Diffusion of Sb in Si1-xGex-Alloy Layers", Defect and Diffusion Forum, Vols. 143-147, pp. 1125-1130, 1997

Online since:

January 1997

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