Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations

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Periodical:

Defect and Diffusion Forum (Volumes 148-149)

Edited by:

David J. Fisher

Pages:

103-121

DOI:

10.4028/www.scientific.net/DDF.148-149.103

Citation:

H. Cerva "Defects Below Mask Edges in Silicon Induced by Amorphizing Implantations", Defect and Diffusion Forum, Vols. 148-149, pp. 103-121, 1997

Online since:

March 1997

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$35.00

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