Propagation of Dry Etch-Induced Damage in III-V Semiconductors

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Periodical:

Defect and Diffusion Forum (Volumes 157-159)

Edited by:

D.J. Fisher

Pages:

175-190

DOI:

10.4028/www.scientific.net/DDF.157-159.175

Citation:

C. H. Chen and E. L. Hu, "Propagation of Dry Etch-Induced Damage in III-V Semiconductors", Defect and Diffusion Forum, Vols. 157-159, pp. 175-190, 1998

Online since:

March 1998

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$35.00

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