Paper Titles

Diffusion of Dopants and Impurities in GaN and Related Materials
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Donor-Related Deep Levels in in_1-xGa_xAs_yP_1-y
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Annealing-Related Phenomena in Bulk Semi-Insulating Indium Phosphide
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Diffusion and Defects in Yb-Impanted InP
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The Annealing Behavior of Irradiated Diffused Junction and Epitaxial InP Solar Cells
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Hydrogen as a Deep Imputity in Semiconductors and Its Interaction with Deep Centers in III-V Compounds
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Propagation of Dry Etch-Induced Damage in III-V Semiconductors
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Hydrogen Diffusion in III-V Semiconductors: Application to the Fabrication and Optimization of Photonic Devices
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Interplay between Interface Dislocations and Surface Kinetic: A Contribution to the Roughness of Strained Epitaxial Layers
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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 157-159Propagation of Dry Etch-Induced Damage in III-V...

Propagation of Dry Etch-Induced Damage in III-V Semiconductors

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Diffusion in GaAs and other III-V Semiconductors

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Periodical:

Defect and Diffusion Forum (Volumes 157-159)

Pages:

175-190

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.157-159.175

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Online since:

March 1998

Authors:

Ching Hui Chen, Evelyne L. Hu

Keywords:

Ion Channeling, Ion-Assisted Dry Etching, Ion-Induced Damage, Multiple Quantum Wells, Radiation-Enhanced Diffusion

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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