The Investigation of Structures, Defects and Electrical Properties of GaAs Films Implanted with Arsenic Ions

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Periodical:

Defect and Diffusion Forum (Volumes 157-159)

Edited by:

D.J. Fisher

Pages:

37-62

DOI:

10.4028/www.scientific.net/DDF.157-159.37

Citation:

W.-C. Chen et al., "The Investigation of Structures, Defects and Electrical Properties of GaAs Films Implanted with Arsenic Ions", Defect and Diffusion Forum, Vols. 157-159, pp. 37-62, 1998

Online since:

March 1998

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$35.00

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