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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 157-159Point Defects and Interdiffusion at GaAs...

Point Defects and Interdiffusion at GaAs Heterojunctions

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Diffusion in GaAs and other III-V Semiconductors

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Periodical:

Defect and Diffusion Forum (Volumes 157-159)

Pages:

17-36

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.157-159.17

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Online since:

March 1998

Authors:

R.M. Cohen

Keywords:

Dielectric Encapsulation, Equilibrium, Hydrogen Passivation, Ion Implantation, Native Defects, Phase Diagram

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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