Collection of Laser Ablation Products by Means of an Electrostatic Field

Abstract:

The work is devoted to the problem of controlled laser micromachining of materials surface layers. The problem of ablation products reverse deposition near the laser processing region is considered. Laser ablation products, in addition to direct interaction with laser radiation, significantly increase lifetime and temperature of laser-induced plasma torch, which leads to decrease in energy entering processing area, as a result of which not removal, but heating of coating material occurs. Ablated particles can be deposited on the processed samples surface, which causes distortions in recorded structure spatial geometry. The possibility of using an electrostatic filtration system is considered as a method for protecting treated surface.

• Periodical: Defect and Diffusion Forum (Volume 410)
• Pages: 748-752
• DOI: https://doi.org/10.4028/www.scientific.net/DDF.410.748
• Online since: August 2021
• Authors: Ruslan V. Chkalov*, Darya G. Chkalova
• Keywords: Electrostatic Field, Femtosecond Laser, Material Ablation, Micromachining, Thin-Film Elements

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