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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 95-98Low-Temperature Diffusion of Hydrogen and the...

Low-Temperature Diffusion of Hydrogen and the Roles of Defects in Silicon

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Diffusion in Materials - DIMAT 1992

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Periodical:

Defect and Diffusion Forum (Volumes 95-98)

Pages:

1001-1006

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.95-98.1001

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Online since:

January 1993

Authors:

Y. Kamiura, Y. Nishiyama, Fumio Hashimoto

Keywords:

Deep-Level Transient Spectroscopy, Diffusion in Si, Hydrogen Diffusion, Hydrogen-Carbon Complex, Recombination-Enhanced Dissociation

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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