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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 95-98Tem Studies on the Interdiffusion of...

Tem Studies on the Interdiffusion of In_xGa_1-xAs/GaAs/Si Heterostructure

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Diffusion in Materials - DIMAT 1992

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Periodical:

Defect and Diffusion Forum (Volumes 95-98)

Pages:

977-982

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.95-98.977

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Online since:

January 1993

Authors:

Kazuhito Kamei, Koji Fujita, Y. Shiba, H. Katahama, Yasuhiro Maehara

Keywords:

Buffer Layer, Epitaxial Growth, GaAs, Heterostructure, InGaAs, Interdiffusion, Silicon, TEM

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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