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B Diffusion in Si Predamaged with Si⁺, C⁺ and Ge⁺ Implantation
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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 95-98Implantation and Migration of Gold Atoms in...

Implantation and Migration of Gold Atoms in Silicon Induced by MeV Electron Irradiation

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Diffusion in Materials - DIMAT 1992

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Periodical:

Defect and Diffusion Forum (Volumes 95-98)

Pages:

973-976

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.95-98.973

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Online since:

January 1993

Authors:

Hirotaro Mori, Toshiya Sakata, Masakatsu Maeda, Hiroyuki Y. Yasuda

Keywords:

Electron Irradiation, HVEM, Radiation-Induced Diffusion

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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