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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 95-98Amorphization and Solid Phase Epitaxial Growth in...

Amorphization and Solid Phase Epitaxial Growth in Ion Implanted III-V Compound Semiconductors

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Diffusion in Materials - DIMAT 1992

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Periodical:

Defect and Diffusion Forum (Volumes 95-98)

Pages:

989-994

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.95-98.989

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Online since:

January 1993

Authors:

M. Taniwaki, M. Yanaba, Toshimasa Yoshiie, Yasunori Hayashi

Keywords:

Amorphisation, Epitaxial Growth, III-V Compound Semiconductors

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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