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HomeKey Engineering MaterialsKey Engineering Materials Vols. 214-215Effects of the Surface Compositions on Electrical...

Effects of the Surface Compositions on Electrical Properties of Pb(Zr,Ti)O₃ Thin Films

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Asian Ceramic Science for Electronics I

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Periodical:

Key Engineering Materials (Volumes 214-215)

Pages:

101-104

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.214-215.101

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Online since:

July 2001

Authors:

Y. Xuan, N. Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani, Mineharu Tsukada, N. Kamehara

Keywords:

Chemical Solution Deposition CSD, Electrical Properties, MOCVD, Pb(Zr,Ti)O₃ (PZT), Surface Composition, Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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