Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition

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M. Miyayama, T. Takenaka, M. Takata and K. Shinozaki

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61-64

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A. Sakurai et al., "Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition", Key Engineering Materials, Vol. 269, pp. 61-64, 2004

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August 2004

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