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HomeKey Engineering MaterialsKey Engineering Materials Vol. 269Preparation and Characterization of Lead Zirconate...

Preparation and Characterization of Lead Zirconate Titanate Thin Films on Si Substrate by Metal-Organic Chemical Vapor Deposition

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Electroceramics in Japan VII

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Periodical:

Key Engineering Materials (Volume 269)

Pages:

61-64

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.269.61

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Online since:

August 2004

Authors:

Atsushi Sakurai, Toshiyuki Nakaiso, Kunio Nishida, Akira Ando, Yukio Sakabe

Keywords:

Gradient-Composition Layer, Lead Zirconate Titanate, Metal-Organic Chemical Vapor Deposition, Silicon, Thin Film

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[5] H. Doi, T. Atsuki, N. Soyama, G. Sasaki, T. Yonezawa and K. Ogi, Jpn. J. Appl. Phys., 33 (1994), p.5159. e-mail address : sakurai@murata. co. jp, Fax: 077-587-(1923).