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HomeKey Engineering MaterialsKey Engineering Materials Vol. 269Influence of SRO Top Electrode on Fatigue...

Influence of SRO Top Electrode on Fatigue Characteristics of FRAM

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Electroceramics in Japan VII

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Periodical:

Key Engineering Materials (Volume 269)

Pages:

69-74

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.269.69

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Online since:

August 2004

Authors:

Osamu Matsuura, Masaki Kurasawa, Shigeyoshi Umemiya, Kenji Maruyama, Kazuaki Kurihara

Keywords:

Fatigue, FRAM, MOCVD, PZT, SRO

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[3] K. Maruyama, K. Asaka, O. Matsuura, M. Kurasawa, H. Hyodo, S. Umemiya, K. Kurihara, K. Matsuura, K. Takai, M. Nakabayashi, Y. Horii and T. Eshita, Abstract of the Non-Volatile Semiconductor Memory workshop on IEEE, 2003(2003), p.101.

[4] J.S. Cross, M. Fujiki, M. Tsukada, Y. Kotaka and Y. Goto, Integrated Ferroelectrics, 21 (1998) 263. e-mail: o-matsuura@jp. fujitsu. com Fax: +81-46-248-8812, http: /www. labs. fujitsu. com.