Measurement of Micro-Tensile Properties for Hard Coating Material TiN

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

1113-1118

DOI:

10.4028/www.scientific.net/KEM.270-273.1113

Citation:

S. C. Yeon et al., "Measurement of Micro-Tensile Properties for Hard Coating Material TiN", Key Engineering Materials, Vols. 270-273, pp. 1113-1118, 2004

Online since:

August 2004

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$38.00

[1] Datasheet on Physical Properties of TiN Coatings, BryCoat Inc.

[2] Mohamed Gad-el-Hak: The MEMS Handbook (CRC Press, 2002).

[3] W.N., Sharper, Jr., B. Yuan, and R.L., Edwards: J. microelectromechnical systems, Vol. 6 No. 3 (1997), p.193.

[4] D.T., Read: Mesaurement Science and Technology, Vol. 9 (1998), p.676.

[5] H.D. Espinosa, and B.C. Prorok, M. Fisher: Proc. of the SEM Annual Conf. (2001), p.446.

[6] Y. -H. Huh, et al. : Proc. of APCNDT2003 (2003) to be presented.

[7] J.A. Thornton: J. Vac. Sci. Technol., Vol. 11 (1974), p.666.

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