Preparation of (111)-Oriented Pt Electrode Films with Quasi-Monocrystal Properties on MgO/TiN Buffered Si(100) by PLD

Tong Lai Chen; Xiao Min Li

doi:10.4028/www.scientific.net/KEM.280-283.823

Paper Titles

Preparation of TiO₂ Thin Films Using Inorganic Peroxo Titanic Complex and Autoclaved Sols as Precursors
p.809

TiO₂ Coating on Optical Fiber with Different Slurry States
p.813

Study on the Macro-Residual Stress of 304 Stainless Steel Coated with TiO₂-SiO₂ Thin Films by Sol-Gel Process
p.815

Study on Nano Film of TiO₂ and ZnFe₂O₄ Composite Prepared by Dip Coating Method
p.819

Preparation of (111)-Oriented Pt Electrode Films with Quasi-Monocrystal Properties on MgO/TiN Buffered Si(100) by PLD
p.823

Preparation of TiO₂ Coating on the Glass and Hydrophilicity under Sunlight Irradiation
p.827

The Properties of Antimony-Doped Tin Oxide Thin Films by the Sol-Gel Approach
p.831

On the Microstructure and Electrical Properties of Undoped and Antimony- Doped Tin Oxide Thin Film Deposited by Sol-Gel Process
p.835

Growth and Characterizations of Relaxor-Based Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ Thin Films by Sol-Gel Method
p.839

HomeKey Engineering MaterialsKey Engineering Materials Vols. 280-283Preparation of (111)-Oriented Pt Electrode Films...

Preparation of (111)-Oriented Pt Electrode Films with Quasi-Monocrystal Properties on MgO/TiN Buffered Si(100) by PLD

Abstract:

Atomic-scale smooth Pt electrode films have been deposited on MgO/TiN buffered Si (100) by the pulsed laser deposition (PLD) technique. The whole growth process of the multilayer films was monitored by using in-situ reflection high energy electron diffraction (RHEED) apparatus. The Pt/MgO/TiN/Si(100) stacked structure was also characterized by X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). The HREED observations show that the growth mode of the Pt electrode film is 2D layer-by-layer growth. It is found that the (111)-oriented Pt electrode film has a crystallinity comparable to that of monocrystals. The achievement of the quasi-single-crystal Pt electrode film with an atomic-scale smooth surface is ascribed to the improved crystalline quality of the MgO film.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 280-283)

Pages:

823-826

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.280-283.823

Citation:

Cite this paper

Online since:

February 2007

Authors:

Tong Lai Chen, Xiao Min Li

Keywords:

PLD, Pt, RHEED, Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] H.N. Lee, D. Hesse, N. Zakharov and U. Gosele: Science Vol. 296 (2002), pp. (2006).

Google Scholar

[2] G. Asayama, J. Lettieri, M.A. Zurbuchen, et al.: Appl. Phys. Lett. Vol. 80 (2002), p.2371.

Google Scholar

[3] B.T. Liu, K. Maki, S. Aggarwal, et al.: Appl. Phys. Lett. Vol. 80 (2002), p.3599.

Google Scholar

[4] E.R. Myers, B.A. Tuttle, S.B. Desu and P.K. Larsen: Mater. Res. Soc. Symp. Proc. Vol. 310 (1993), p.195.

Google Scholar

[5] D.K. Fork, F.A. Ponce, J.C. Tramontana and T.H. Geballe: Appl. Phys. Lett. Vol. 58 (1991), p.2294.

Google Scholar

[6] A.D. Benedittis, A.D. Cristoforo, G. Majni, et al.: Appl. Surf. Sci. Vol. 109-110 (1997), p.299.

Google Scholar

[7] S.S. Kim, B.I. Kim, Y.B. Park, T.S. Kang and J.H. Je: Appl. Surf. Sci. Vol. 169-170 (2001), p.553.

Google Scholar

[8] R. Bruchhaus, D. Pitzer, O. Eibl, et al.: Mat. Res. Soc. Symp. Proc. Vol. 243 (1992), p.123.

Google Scholar

[9] J.O. Olowolafe, R.E. Jones, A.C. Campbell, et al.: Mat. Res. Soc. Symp. Proc. Vol. 243 (1992), p.355.

Google Scholar

[10] A. Masuda, Y. Yamanaka, M. Tazoe, et al.: J. Cryst. Growth Vol. 84 (1996), p.158.

Google Scholar