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The Properties of Antimony-Doped Tin Oxide Thin Films by the Sol-Gel Approach
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The Properties of Antimony-Doped Tin Oxide Thin Films by the Sol-Gel Approach

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Abstract:

Antimony-doped tin oxide thin films have a range of technical applications as conductive coatings, and sol-gel processing seems to offer some advantages over other coating techniques. In this study, the sol was prepared by sol-gel approach from SnO2·H2O and SbCl3 in alcohol. It was found that the heat-treatment temperature and doping level have strong influences on the microstructure and composition of Sb: SnO2 films. The SnO2 crystals exist mainly as tetragonal rutile structure. The optimum heat-treatment temperature is about 450 ~ 500°C, and the film is composed with nanocrystals and nano-pores. Microstructure and the electrical behaviors of Sb-doped SnO2 thin films derived by sol-gel process were investigated.

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Periodical:

Key Engineering Materials (Volumes 280-283)

Pages:

831-834

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.280-283.831

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Online since:

February 2007

Authors:

Lan Zhao, Dao Li Zhang, Gang Du, Jian Mei Xu, Dong Xiang Zhou

Keywords:

Antimony-Doped Tin Oxide, Sol-Gel Approach, Thin Film

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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