Preparation of SrBi2Ta2O9 Ferroelectric Thin Films by Liquid Source Misted Chemical Vapor Deposition Method Using Inorganic Salt Solution

Hui Ming Ji; Yan Fei Gu; Hui Meng; Ting Xian Xu

doi:10.4028/www.scientific.net/KEM.280-283.853

Paper Titles

On the Microstructure and Electrical Properties of Undoped and Antimony- Doped Tin Oxide Thin Film Deposited by Sol-Gel Process
p.835

Growth and Characterizations of Relaxor-Based Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ Thin Films by Sol-Gel Method
p.839

Synthesis and Microstructure of Barium Bismuth Titanate Thin Films Using a Sol-Gel Technique
p.845

Preparation and Electrical Properties of (100) Preferred (Ba,Sr)TiO₃ Bilayer Thin Films Derived from Pulse Laser Deposition Method
p.849

Preparation of SrBi₂Ta₂O₉ Ferroelectric Thin Films by Liquid Source Misted Chemical Vapor Deposition Method Using Inorganic Salt Solution
p.853

Evaluation of Texture in Pb(Zr_0.52Ti_0.48)O₃ Films Prepared by Sol-Gel Route
p.857

Effects of Seeding on Large Crystal Growth of NaX Zeolite by Continuous Crystallisation
p.861

Effect of Process Conditions on Stability of Ni-ZrO₂ Composite Electroplating Bath
p.865

Study on Alkyd-Based Electrically Conductive Coatings
p.869

HomeKey Engineering MaterialsKey Engineering Materials Vols. 280-283Preparation of SrBi2Ta2O9 Ferroelectric Thin Films...

Preparation of SrBi₂Ta₂O₉ Ferroelectric Thin Films by Liquid Source Misted Chemical Vapor Deposition Method Using Inorganic Salt Solution

Abstract:

A liquid source misted chemical vapor deposition (LSMCVD) system was used to deposit SrBi2Ta2O9 ferroelectric thin films on Pt/TiO2/SiO2/Si substrates using strontium nitrate, bismuth nitrate and fluorine tantalum acid as the starting ingredients. Citric acid, ethylene glycol, and ethylenediaminetetraacctic acid were employed as chelating agents to form homogeneous and stable sol. A density, homogenous, crack-free and c-axis oriented SrBi2Ta2O9 thin films were prepared successfully and the resultant thin film exhibits the ferroelectric properties of 2Pr of 3.8 C/cm2, 2Ec of 60kV/cm at ±3.5 V, respectively.