Fabrication of Si3N4 Micro-Components by a Combined Microfabrication Process

Abstract:

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Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S3N4 reaction sintering. Si3N4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.

Info:

Periodical:

Edited by:

Hai-Doo Kim, Hua-Tay Lin and Michael J. Hoffmann

Pages:

28-32

DOI:

10.4028/www.scientific.net/KEM.287.28

Citation:

J. F. Li et al., "Fabrication of Si3N4 Micro-Components by a Combined Microfabrication Process", Key Engineering Materials, Vol. 287, pp. 28-32, 2005

Online since:

June 2005

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Price:

$35.00

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