Fabrication of Si3N4 Micro-Components by a Combined Microfabrication Process
Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S3N4 reaction sintering. Si3N4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.
Hai-Doo Kim, Hua-Tay Lin and Michael J. Hoffmann
J. F. Li et al., "Fabrication of Si3N4 Micro-Components by a Combined Microfabrication Process", Key Engineering Materials, Vol. 287, pp. 28-32, 2005