Fabrication of Si3N4 Micro-Components by a Combined Microfabrication Process

Jing Feng Li; Song Zhe Jin; Yong Li

doi:10.4028/www.scientific.net/KEM.287.28

Paper Titles

Development and Industrial Application of Silicon Nitride Based Ceramics
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Development of Silicon Nitride Components for Gas Turbine
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Advanced SiC/SiC Composite Materials for Fourth Generation Gas Cooled Fast Reactors
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Electric Properties of Ti₃SiC₂ at High Frequency Alternating Current
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Fabrication of Si₃N₄ Micro-Components by a Combined Microfabrication Process
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Biomimetic Application of Hierarchically Ordered Nanoporous Silica Ceramics
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The Drug Delivery Application of Sponge Phased Silica Ceramic Structure
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Preparation and Characterization of Catalyst-Containing SiC Fiber Filter Media
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Application of Powder Blasting Techniques to Micro-Pattern Making Process for Si₃N₄-hBN Composites
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 287Fabrication of Si3N4 Micro-Components by a...

Fabrication of Si₃N₄ Micro-Components by a Combined Microfabrication Process

Abstract:

Si-based high-temperature ceramics are attractive materials for power microelectromechanical systems (power MEMS), such as microscale gas turbines, micro-combustors and micro-reactors. This presentation introduces a novel process for the microfabrication of Si3N4 ceramics, which mainly consists of pre-sintering of Si powder compacts, micromachining of pre-sintered Si preforms and reaction sintering of the micromachined Si preforms. The present process has its high potential for Si3N4 3-dimensional microfabrication because it combines the machinablity of pre-sintered Si powder compacts and near-net shaping characteristic of S3N4 reaction sintering. Si3N4 micro-components such as micro nozzle arrays and micro-rotor were fabricated by using the present process.

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Periodical:

Key Engineering Materials (Volume 287)

Pages:

28-32

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.287.28

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Online since:

June 2005

Authors:

Jing Feng Li, Song Zhe Jin, Yong Li

Keywords:

Ceramic Microfabrication, Electro Discharge Machining (EDM), Reaction Sintering, Spark Plasma Sintering (SPS)

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