New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials

Jun Hyub Park; Chung Youb Kim; Sung Hoon Choa; Chang Seung Lee; Woo Seong Che; Ji Ho Song

doi:10.4028/www.scientific.net/KEM.297-300.545

Paper Titles

A New Specimen for Measuring the Interfacial Toughness of Al-0.5%Cu Thin Film on Si Substrate
p.521

Strength Analysis of MEMS Micromirror Devices - Effects of Loading Mode and Etching Damage
p.527

Mechanical Properties and Process of ZnO Deposited Various Substrates
p.533

The Study on Fatigue Life of Interconnect with Respect to Geometrical Shape of Supporting Structure and Load Conditions in MEMS
p.539

New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials
p.545

Fracture Behavior of Single- and Polycrystalline Silicon Films for MEMS Applications
p.551

The Improvement of Wet Anisotropic Etching with Megasonic Wave
p.557

Influence of Groove Slotting for Micro-Sensor Embedding on Smart Bearing's Mechanical Characteristics
p.562

Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
p.567

HomeKey Engineering MaterialsKey Engineering Materials Vols. 297-300New Structures and Techniques for Easy Axial...

New Structures and Techniques for Easy Axial Loading Test of Static and Fatigue Properties of MEMS Materials

Abstract:

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems (MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an axial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.

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Periodical:

Key Engineering Materials (Volumes 297-300)

Pages:

545-550

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.297-300.545

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Online since:

November 2005

Authors:

Jun Hyub Park, Chung Youb Kim, Sung Hoon Choa, Chang Seung Lee, Woo Seong Che, Ji Ho Song

Keywords:

Axial Loading, Fatigue Property, MEMS Material, Static Property

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References

[1] S. Johansson, J.A. Schweitz, L. Tenez and J. Tiren: Fracture testing of silicon micro-elements in situ in a scanning electron microscope, J. Appl. Phys. 62 (10) (1988), pp.4799-4803.

Google Scholar

[2] K. Komai, K. Minoshima, H. Tawara, S. Inoue and K. Sunako: Development of mechanical testing machine for micro-elements and fracture strength evaluaion of single-crystalline sislicon micro-elements, Trans. Jpn. Sco., Mech. Eng. A 60-569 (1994).

Google Scholar

[3] E.I. Bromley, J.N. Randall, D.C. Flanders and R.W. Mountain: A techniqu for the determination of stress in thin-films, J. Vac. Sci. Technol. B 1 (4) (1983), pp.1364-1366.

Google Scholar

[4] O. Tabata, K. Kawashata, S. Sugiyama and I. Igarashi: Mechanical property measurement of thin- films using load-deflection of composite rectangular membrane, in: Proceedings of the IEEE Micro- Electro Mechanical Systems Workshop (1989).

DOI: 10.1109/memsys.1989.77981

Google Scholar

[5] J. Koskinen, J.E. Steinwall, R. Soave and H.H. Johnson: Microtensile test of free-standing polysilicon fibers of various grain sizes, J. Micromech. Microeng. 3 (1993), pp.13-17.

DOI: 10.1088/0960-1317/3/1/004

Google Scholar

[6] T. Tsuchiya, O. Tabata, J. Sakata and Y. Taga: Specimen size effect on tensile strength of surface micro-machined polycrystalline silicon thin-films, in: Proceedings of the IEEE MEMS '97 (1997), pp.529-534.

DOI: 10.1109/memsys.1997.581921

Google Scholar

[7] S. Greek, F. Ericson, S. Johansson, M. Furtsch and A. Rump: Mechanical characterization of thick polysilicon films: Young, s modulus and fracture strength evaluated with microstructure, J. Micromech. Microeng. 9 (1999), pp.245-251.

DOI: 10.1088/0960-1317/9/3/305

Google Scholar

[8] W.N. Sharpe Jr., B. Yuan, R. Vaidyanathan and R.L. Edwards: Measurement of young's modulus, Poisson's ratio, and tensile strength of polysilicon, in: Proceedings of the IEEE MEMS '97 (1997), pp.424-429.

Google Scholar