Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

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Periodical:

Key Engineering Materials (Volumes 297-300)

Edited by:

Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim

Pages:

567-573

DOI:

10.4028/www.scientific.net/KEM.297-300.567

Citation:

Y. Isono et al., "Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS ", Key Engineering Materials, Vols. 297-300, pp. 567-573, 2005

Online since:

November 2005

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$35.00

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