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HomeKey Engineering MaterialsKey Engineering Materials Vols. 297-300Development of Full-Reversed Bending Fatigue...

Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS

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Advances in Fracture and Strength

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Periodical:

Key Engineering Materials (Volumes 297-300)

Pages:

567-573

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.297-300.567

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Online since:

November 2005

Authors:

Yoshitada Isono, Takanori Kikuchi, Hiroaki Kitoh

Keywords:

Atomic Force Microscope (AFM), Cantilever, Cyclic Bending Test, Fatigue Damage, Silicon

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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