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HomeKey Engineering MaterialsKey Engineering Materials Vol. 312Molecular Dynamics Simulation of Nano-Indentation...

Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon

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Abstract:

This paper presents the molecular dynamics (MD) simulation of nano-indentation of diamond-like carbon (DLC) coating on silicon substrates. It is found that the mechanisms of nanoindentation of coated systems on the nanometre scale defers considerably from the same process on the micrometre scale. The coating thickness affects the mechanisms of plastic deformation both in the coating and the substrate.

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Periodical:

Key Engineering Materials (Volume 312)

Pages:

351-356

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.312.351

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Online since:

June 2006

Authors:

Wun Chet Davy Cheong, Liang Chi Zhang

Keywords:

Diamond Coating, Monocrystalline Silicon, Nanoindentation, Phase Transformation, Plastic Deformation

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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