Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon

Abstract:

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This paper presents the molecular dynamics (MD) simulation of nano-indentation of diamond-like carbon (DLC) coating on silicon substrates. It is found that the mechanisms of nanoindentation of coated systems on the nanometre scale defers considerably from the same process on the micrometre scale. The coating thickness affects the mechanisms of plastic deformation both in the coating and the substrate.

Info:

Periodical:

Edited by:

Hong-Yuan Liu, Xiaozhi Hu and Mark Hoffman

Pages:

351-356

DOI:

10.4028/www.scientific.net/KEM.312.351

Citation:

W. C. D. Cheong and L. C. Zhang, "Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon", Key Engineering Materials, Vol. 312, pp. 351-356, 2006

Online since:

June 2006

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$35.00

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