Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon
This paper presents the molecular dynamics (MD) simulation of nano-indentation of diamond-like carbon (DLC) coating on silicon substrates. It is found that the mechanisms of nanoindentation of coated systems on the nanometre scale defers considerably from the same process on the micrometre scale. The coating thickness affects the mechanisms of plastic deformation both in the coating and the substrate.
Hong-Yuan Liu, Xiaozhi Hu and Mark Hoffman
W. C. D. Cheong and L. C. Zhang, "Molecular Dynamics Simulation of Nano-Indentation of Carbon Coated Monocrystalline Silicon", Key Engineering Materials, Vol. 312, pp. 351-356, 2006