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HomeKey Engineering MaterialsKey Engineering Materials Vol. 312Indentation Size Effect on Hardness of...

Indentation Size Effect on Hardness of Nanostructured Thin Films

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Abstract:

Based on nanoindentation techniques, the evaluation of hardness of two nanostructured thin films, AlN and Ti-Al-N, is discussed. In the case of AlN films, the indentation size effect of hardness can be modeled using the concept of geometrically necessary dislocations, whereas in the case of Ti-Al-N films, the measured hardness increases exponentially as the indentation depth decreases. The results show that, as thin films approach superhard, dislocation-based plastic deformation is gradually replaced by grain-boundary mediated deformation.

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Periodical:

Key Engineering Materials (Volume 312)

Pages:

363-368

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.312.363

Citation:

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Online since:

June 2006

Authors:

Chun Sheng Lu, Yiu Wing Mai, Yao Gen Shen

Keywords:

Aluminum Nitride (AlN), Hardness, Nanoindentation, Size Effect, Thin Film, Ti-Al-N

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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