Research on Ultra-Precision Lapping Technology for Super-Smooth Surface of KTP Crystal

Bing Hai Lv; Ju Long Yuan; Ying Xue Yao; Zhi Wei Wang; Fei Yan Lou; Ping Zhao

doi:10.4028/www.scientific.net/KEM.315-316.284

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Study on the Testing Technology of Main Residual Stress of Metal Sheet Based on Soft X-Ray Diffraction Stress Analyzer
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Research on Ultra-Precision Lapping Technology for Super-Smooth Surface of KTP Crystal
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Study on the Mechanism of the Continuous Composite Electroplating Polishing for Silicon Wafer
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The New Technology of Floating Polishing of Large Die Surfaces
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 315-316Research on Ultra-Precision Lapping Technology for...

Research on Ultra-Precision Lapping Technology for Super-Smooth Surface of KTP Crystal

Abstract:

The ultra-precision lapping processes to obtain the damage-free surfaces at Å level surface roughness of Potassium titanyl phosphate (KTiOPO4, KTP) crystal is studied in this paper. The influence of the lapping parameters on the stoke removal rate and surface roughness and material removal mechanism in the process of ultra-precision lapping process is discussed, and the evolution of the lapped surface is also observed with electric telescope. A super-smooth surface of quartz crystal with roughness Ra 0.8667 Å has been obtained by adopting the fine SiO2 abrasive powders and the elastic polyurethane pad in this study.

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Periodical:

Key Engineering Materials (Volumes 315-316)

Pages:

284-288

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.315-316.284

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Online since:

July 2006

Authors:

Bing Hai Lv, Ju Long Yuan, Ying Xue Yao, Zhi Wei Wang, Fei Yan Lou, Ping Zhao

Keywords:

Potassium Titanyl Phosphate (KTP), Super-Smooth Surface, Ultra-Precision Lapping

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