The New Technology of Floating Polishing of Large Die Surfaces
During the transferring process of the large die surfaces, there are extensive needs of die surface polishing. Since almost large die surfaces are free-form surfaces, currently, these are almost manually implemented. In order to overcome this barrier, this paper focuses on a new technology of floating polishing, including a) the design of polisher body which has five degrees of freedom and realize the floating polishing while keep the polishing head being indifference equilibrium within the working range, b) normal force of polishing head on die surface analyses and experimental verification by using the slip line field method, and c) establishments of the interference boundaries between dies surface features and polishing head. The research achievements will be used for the development of a portable, state-of-the-art polishing machine and the optimization of the associated polishing process parameters in near future.
Zhejun Yuan, Xipeng Xu, Dunwen Zuo, Julong Yuan and Yingxue Yao
X. C. Xu et al., "The New Technology of Floating Polishing of Large Die Surfaces", Key Engineering Materials, Vols. 315-316, pp. 294-298, 2006