Electronic Transport Properties of Chemical Gas Sensor Using Conducting Polymer PAni
The conducting polymer PAni is coated on Au electrode sample by spin coater on 500rpm and 3000rpm for 5sec and 30sec. Then, it was drying 10min at 180C. The layer thickness was 140~200nm. The electrodes were fabricated the resist pattern by electron beam writing machine which was performed on a Raith75 e-Line on the PMMA 950K, thickness 100nm. The electrodes were written at an electron does of 200uAs/cm2 and developed for 40sec in a 1:3 MIBK (methyl-isobutyl-ketone): IPA (isopropyl alcohol) solution. Metal lift-off of the PMMA in acetone was preceded by an e-beam evaporation consisting of 50Å Cr and 250Å Au. Electrical measurements were performed on low-noise commercial probe stations equipped. We measured distance between the electrodes ranges from a few tens of nanometer to hundreds nanometer by AFM (Atomic Force Microscopy) which was done with silicon tips in non-contact mode on a PSIA, XE-100.
Soon-Bok Lee and Yun-Jae Kim
J. J. Lee et al., "Electronic Transport Properties of Chemical Gas Sensor Using Conducting Polymer PAni", Key Engineering Materials, Vols. 326-328, pp. 1363-1366, 2006