A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors

Abstract:

Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.

• Periodical: Key Engineering Materials (Volumes 326-328)
• Pages: 1379-1382
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.326-328.1379
• Online since: December 2006
• Authors: Tung Wei Lin, Max Ti Kuang Hou, Rong Shun Chen
• Keywords: Displacement Sensing, MEMS Position Encoder, Suspended Gate

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