A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors

Abstract:

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Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.

Info:

Periodical:

Key Engineering Materials (Volumes 326-328)

Edited by:

Soon-Bok Lee and Yun-Jae Kim

Pages:

1379-1382

DOI:

10.4028/www.scientific.net/KEM.326-328.1379

Citation:

T. W. Lin et al., "A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors", Key Engineering Materials, Vols. 326-328, pp. 1379-1382, 2006

Online since:

December 2006

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Price:

$35.00

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