A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors
Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.
Soon-Bok Lee and Yun-Jae Kim
T. W. Lin, M. T. K. Hou, R. S. Chen, "A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors", Key Engineering Materials, Vols. 326-328, pp. 1379-1382, 2006