Determination of Thermal Conductivity of Amorphous Silicon Thin Films via Non-Contacting Optical Probing

Abstract:

The thermal conductivity of amorphous silicon (a-Si) thin films is determined by using the non-intrusive, in-situ optical transmission measurement. The thermal conductivity of a-Si is a key parameter in understanding the mechanism of the recrystallization of polysilicon (p-Si) during the laser annealing process to fabricate the thin film transistors with uniform characteristics which are used as switches in the active matrix liquid crystal displays. Since it is well known that the physical properties are dependent on the process parameters of the thin film deposition process, the thermal conductivity should be measured. The temperature dependence of the film complex refractive index is determined by spectroscopic ellipsometry. A nanosecond KrF excimer laser at the wavelength of 248 nm is used to raise the temperature of the thin films without melting of the thin film. In-situ transmission signal is obtained during the heating process. The acquired transmission signal is fitted with predictions obtained by coupling conductive heat transfer with multi-layer thin film optics in the optical transmission measurement.

• Periodical: Key Engineering Materials (Volumes 326-328)
• Pages: 689-692
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.326-328.689
• Online since: December 2006
• Authors: Seung Jae Moon
• Keywords: Amorphous Silicon Thin Film, Ellipsometry, Optical Property, Thermal Conductivity (TC), Thin Film Optics, Transmissivity

References

[1] P.B. Allen and J.L. Feldman: Phys. Rev. Lett. Vol. 62 (1989) p.645.

[2] B. K Sun, X. Zhang, and C.P. Grigoropoulos: Int. J. Heat Mass Trans. Vol. 40 (1997) p.1591.

[3] M. Born and E. Wolf: Principles of Optics (Cambridge Univ. Press, U.K. 1980).

[4] S.J. Moon: Ph.D. dissertation, (U.C. Berkeley, U.S.A. 2001).

[5] E.D. Palik: Handbook of Optical Constants of Solids (Academic Press, U.S.A. 1985).

[6] Y.S. Touloukian, R.W. Powell, C.Y. Ho and P.G. Klemens: Thermophysical properties of matter; Themal conductivity: Nonmetallic Solids, Vol. 2 (IFI/Plenum, New York-Washington 1970).

[7] Y.S. Touloukian and E.H. Buyco: Thermophysical properties of matter; Specific Heat: Nonmetallic Solids, Vol. 2 (IFI/Plenum, New York-Washington 1970).

[8] D.G. Cahill: Rev. Sci. Instrum. Vol. 61 (1990) p.802.

[9] D.G. Cahill, M. Katiyar, and J.R. Abelson: Phys. Rev. B Vol. 50 (1994) p.6077.

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