Effects of Imperfections on Bifurcation of Multi-Layer Microstructures of MEMS under Thermal Loading
Bifurcation of multi-layer microstructures subjected to thermal loading can be harmful for reliability and stability of MEMS structures. In this paper, three imperfections of geometry, coefficient of thermal expansion and thermal loading were introduced to investigate their effects on structural bifurcation by finite element simulation. Results show that bifurcation is strongly influenced by the imperfections. With larger deviation of imperfections, it results in a decreasing temperature to trigger the bifurcation and a gradual beginning of it.
Shen Dong and Yingxue Yao
Y.T. Yu et al., "Effects of Imperfections on Bifurcation of Multi-Layer Microstructures of MEMS under Thermal Loading", Key Engineering Materials, Vol. 339, pp. 276-280, 2007